tantalum sputter targets

1. Grade: Ta 1 Ta 2
2. Density:16.6 g/ cm 3
3. Purity : 99.95%min
4. size: customized
5. Condition: Vacuum Annealed
6. Surface: Alkaline wash surface / machined
7. Processing technic: CNC Milling Machinery
Product Description

Product Introduction 

When you need reliable materials for precision thin film deposition, tantalum sputter targets deliver exceptional performance across demanding applications. Our high-purity tantalum targets offer superior coating uniformity and consistent sputtering rates for semiconductor, optical, and display manufacturing. With 99.95% minimum purity and customizable dimensions, these targets meet your specific requirements. Whether you're producing electronic chips, optical coatings, or display components, our tantalum sputter targets ensure optimal results every batch.

Key Features and Benefits

You'll appreciate the outstanding properties that make our targets industry-leading:

  • Exceptional Purity: 99.95% minimum purity ensures contamination-free deposition
  • Consistent Density: 16.6 g/cm³ provides stable sputtering performance
  • Superior Uniformity: ≥98% uniformity index improves coating repeatability
  • Low Stress Design: ≤30 MPa residual stress prevents target cracking
  • Custom Sizing: Tailored dimensions fit your specific equipment requirements
  • Clean Surface: Alkaline wash or machined finish options available

Technical Specifications

Parameter Specification
Grade Ta 1, Ta 2
Purity 99.95% minimum
Density 16.6 g/cm³
Thickness 4-20 mm
Condition Vacuum Annealed
Surface Finish Alkaline wash / Machined
Processing Method CNC Milling Machinery
Residual Stress ≤30 MPa
Uniformity Index ≥98%
Hydrogen Content ≤20 ppm
Surface Treatment  Bright surface 
Certificate  ISO 9001:2015
Delivery time  Normal time need 10-15 days 
packing  wooden box 
Features

1. Good ductility, good machinability

2. Good plasticity
3. Excellent corrosion resistance
4. High melting point, high boiling point
5. Very small coefficients of thermal expansion
6. Good capability of absorbing and releasing hydrogen
7. Good biocompatibility

Available Grades and Materials

Our tantalum targets come in multiple grades to suit different application requirements:

Ta 1 Grade: Optimized for general sputtering applications with excellent cost-performance ratio.

Ta 2 Grade: Enhanced purity levels for critical semiconductor and optical applications requiring minimal contamination.

Both grades undergo rigorous quality control to ensure consistent performance and reliability.

Grade

Chemical composition%, no more than

Fe

Si

Ni

W

Mo

Ti

Nb

O

C

H

N

Ta

Ta1

0.005

0.005

0.005

0.005

0.002

0.002

0.005

0.02

0.004

0.002

0.005

Balance

Ta2

0.005

0.005

0.005

0.005

0.002

0.002

0.1

0.03

0.1

0.002

0.01

Balance

Manufacturing Process

We utilize advanced powder metallurgy techniques to create superior targets. Our process begins with high-quality tantalum powder produced through sodium thermal reduction. The powder undergoes cold isostatic pressing at pressures exceeding 200 MPa.

Next, vacuum sintering occurs at temperatures above 2400°C in ultra-high vacuum conditions. This creates dense, uniform ingots with exceptional structural integrity.

Finally, controlled rolling and precise heat treatment optimize the target's microstructure for enhanced sputtering performance.

Annealing furnace Electron beam furnace Lathes Smelting equipment
Lathes Rolling machine Sawing machine Shearing Machine
Raw material inspection
Electron beam melting
titanium Melting
Forging
Titanium forging
Rolling 
Machining and forming
Machining and forming
Final inspection
Dimension inspection
packaging
Packaging

Applications and Industries

Semiconductor Manufacturing: Essential for creating thin films in integrated circuits, capacitors, and resistors. Your chip production benefits from precise film thickness control and superior electrical properties.

Display Technology: Critical for LCD and OLED manufacturing, forming electrodes and barrier layers that enhance display performance and longevity.

Optical Coatings: Perfect for lens manufacturing, architectural glass, and precision optics where transmittance and durability matter most.

Be used in a wide range of industries.

 

Marine engineering

Electronic devices

Medical implants

Medical implants

Medical Equipment

Steel industry

Chemical Processing

Chemical Processing

Aerospace and Defense

Aerospace and Defense

Energy and Environmental Engineering

Energy and Environmental Engineering

Product Dimensions and Tolerances

We provide fully customizable dimensions to match your sputtering equipment specifications. Standard tolerances ensure proper fit and optimal performance in magnetron sputtering systems.

Common configurations include circular, rectangular, and specialized geometries based on your specific requirements.

Quality Assurance and Testing

Every target undergoes comprehensive testing including:

  • Chemical composition analysis
  • Density verification
  • Surface roughness measurement
  • Dimensional accuracy inspection
  • Microstructure examination

Our quality system ensures consistent performance across all production batches.

OEM & Customization Services

We specialize in custom manufacturing to meet your exact specifications. Our experienced team works closely with you to develop targets optimized for your specific applications and equipment.

From prototype development to full-scale production, we support your project requirements with flexible manufacturing capabilities.

Packaging and Shipping

Products are carefully packaged in protective materials to prevent contamination and damage during transit. We ship worldwide with reliable logistics partners ensuring safe, timely delivery to your facility.

Packaging

Packaging

Packaging

Packaging

Packaging Packaging Packaging Packaging

Why Choose Us

With over 30 years of rare metal industry experience, we understand your challenges. Our location in China's "Titanium Capital" provides access to premium raw materials and skilled craftspeople.

We've successfully served customers across 50+ countries including the United States, Germany, South Korea, and Singapore. Our commitment to quality, competitive pricing, and reliable delivery makes us your ideal partner.

Certificationimg-15-15

Certification Certification Certification Certification Certification Certification

FAQs

Q: What backing plate options are available?

A: We offer titanium and copper backing plates with bonding strength ≥45 MPa for enhanced thermal management.

Q: What lead times should I expect?

A: Standard products ship within 1-2 weeks, while custom configurations typically require 2-3 weeks.

Q: Do you provide material certificates?

A: Yes, complete material test certificates accompany every shipment.

Contact Us

Ready to enhance your thin film processes? Contact our technical team today to discuss your requirements. We're here to help you select the perfect tantalum sputter targets for your applications.

Email: info@chdymetal.com

Our experts are standing by to provide technical support and competitive quotations for your project needs.

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